High Pure 99.8% titanium grade 7 rounds sputtering targets ti alloy target for coating factory supplier

Product parameters

Product name	Titanium target for pvd coating machine
Grade	Titanium (Gr1, Gr2, Gr5, Gr7,GR12)   Alloy target: Ti-Al, Ti-Cr, Ti-Zr etc
Origin	Baoji city Shaanxi Province china
Titanium content	≥99.5 (%)
Impurity content	<0.02 (%)
Density	4.51 or 4.50 g/cm3
Standard	ASTM B381; ASTM F67, ASTM F136
Size	1. Round target: Ø30--2000mm, thickness 3.0mm--300mm; 2. Plate Targe: Length: 200-500mm Width:100-230mm Thickness:3--40mm; 3. Tube target: Dia:30-200mm Thickness:5-20mm Length:500-2000mm; 4. Customized is available
Technique	Forged and CNC Machined
Application	Semiconductor separation, Film coating materials, Storage Electrode coating, Sputtering coating, Surface coating, Glass coating industry.

Chemical requirements of titanium target

ASTM B265		GB/T 3620.1	JIS H4600	Elemental content(≤wt%)
				N	C	H	Fe	O	Others
Titanium Pure	Gr.1	TA1	Class1	0.03	0.08	0.015	0.20	0.18	/
	Gr.2	TA2	Class2	0.03	0.08	0.015	0.30	0.25	/
Titanium Alloy	Gr.5	TC4 Ti-6Al-4V	Class60	0.05	0.08	0.015	0.40	0.2	Al:5.5-6.75 V:3.5-4.5
	Gr.7	TA9	Class12	0.03	0.08	0.015	0.30	0.25	Pd:0.12-0.25
	Gr.12	TA10	Class60E	0.03	0.08	0.015	0.30	0.25	Mo:0.2-0.4 Ni:0.6-0.9

Longitudinal mechanical properties at room temperature

Grade	Tensile strength Rm/MPa(>=)	Yield strength Rp0.2(MPa)	Elongation A4D(%)	Reduction of area Z(%)
Gr1	240	140	24	30
Gr2	400	275	20	30
Gr5	895	825	10	25
Gr7	370	250	20	25
Gr12	485	345	18	25

Titanium Sputtering Targets

The common size of the titanium sputter target: Φ100*40, Φ98*40, Φ95*45, Φ90*40, Φ85*35, Φ65*40 etc. Also can customize according to customer' requests or drawings Target requirements: high purity, uniform crystal grains, and good compactness. Purity: 99.5%, 99.95%, 99.98%, 99.995%.

Titanium Target Production process

titanium sponge --- smelted to titanium ingot --- test---cutting the ingot --- forging ---rolling ---peeling --- straightening---ultrasonic flaw detection --- packing

Titanium target Features

1. Low Density and High Specification Strength 2. Excellent Corrosion Resistance 3. Good Resistance to Effect of Heat 4. Excellent Bearing to Cryogenics Property 5. Nonmagnetic and Non-toxic 6. Good Thermal Properties 7. Low Modulus of Elasticity